Oven Series

Test the logic circuit of IC and store the test results, which can realize the ambient/high temperature or cold temperature electric test of IC

Oxygen Free Oven

Applications

Traditional package Application equipment, Advanced package Application equipment

Technology

  • Temperature Max 500°C, Uniformity ± 3°C
  • Single Chamber / Dual Chamber / 4 Chamber / Customized
  • Equipped with HEPA, Class 100, Class 1000
  • Oxygen monitoring alarm prompt, equipped with oxygen content analyzer
  • Support SECS/GEM

Pressure/Vacuum Oven

Dual Chamber Pressure/Vacuum Oven

Applications

For Advanced package underfill, DAF tape Application process, support AGV system

Technology

  • Temperature Max 300°C, Uniformity ± 3°C (Fast temperature rise/drop)
  • Pressure capability Max 16kg, Vacuum capability ≤ 10 torr
  • Chamber diameter 600 / 700 / 900 mm
  • Oxygen monitoring alarm prompt, equipped with oxygen content analyzer
  • Support SECS/GEM and AGV system
Auto Wafer Pressure:Vacuum Oven

Applications

For Advanced package wafer and panel product, support OHT system Load Port + EFEM + Auto pressure oven

Technology

  • Equipped with EFEM system (Wafer Transfer)
  • Temperature Max 300°C, Uniformity ± 3°C (Fast temperature rise/drop)
  • Pressure capability Max 16kg, Vacuum capability ≤ 20 torr
  • Chamber diameter 600 / 700 / 900 mm
  • Oxygen monitoring alarm prompt, equipped with oxygen content analyzer
  • Support SECS/GEM and AGV system

Auto Wafer Clean Oven

Auto Wafer Clean Oven
Auto Wafer Clean Oven MF-AWO4300

Applications

For Advanced package wafer & panel product, support OHT system

Technology

  • Application 8–12 inch, thickness 500–800 µm, Warpage < ± 4 mm
  • Temperature Max 400°C, Uniformity ± 3°C
  • 25 pcs / Cassette, Total 4 Cassette
  • EFEM UNIT: Load Port 4 set / Robot / Align / Buffer area / Cooling area
  • Oxygen monitoring alarm prompt, equipped with oxygen content analyzer
  • Support SECS/GEM

Automatic Oven

4 Chamber Automatic Oven
4 Chamber Automatic Oven

Applications

For Advanced package wafer & panel product, support OHT system

Technology

  • Temperature Max 300°C, Uniformity ± 3°C
  • Single Chamber / Dual Chamber / 4 Chamber / Customized
  • Equipped with HEPA, Class 100 Min
  • Oxygen monitoring alarm prompt, equipped with oxygen content analyzer
  • Support SECS/GEM and AGV system